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| MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by XMMAS500G/D Preliminary Information XMMAS500G10D XMMAS500G10S MICROMACHINED ACCELEROMETER 500g AMPLIFIED Micromachined Accelerometer 500g Amplified The MMAS500G family of silicon capacitive, micro-machined accelerometers features integral signal amplification, signal conditioning, a 4-pole low-pass filter and temperature compensation. Zero-G offset, full scale span and filter roll-off are factory set and require no external passives. A calibrated self-test feature mechanically displaces the seismic mass with the application of a digital self-test signal. The device is offered in either of two plastic packages, thereby accommodating various axis orientation requirements. The MMAS500G incorporates a single polysilicon seismic mass, suspended between two fixed polysilicon plates (G-cell). The forces of acceleration move the seismic mass, thereby resulting in a change in capacitance. The G-cell is sealed at the die level, creating a particle-free environment. The G-cell features built-in damping and over-range stops to protect it from mechanical shock. MMAS500G accelerometers are ideally suited for automotive crash detection and recording, vibration monitoring, automotive suspension control, appliance control systems, etc. Features * Full Scale Measurement 500g * Calibrated, True Self-Test * Standard 16-Pin Plastic DIP * Integral Signal Conditioning and 4-Pole Filter * Linear Output * Robust, High Shock Survivability 1 2 3 4 5 6 7 DIP PACKAGE CASE 648C-03 SIP PACKAGE CASE 447-01 PIN NUMBER N/C (1) N/C (1) N/C (1) Self-Test Output Bypass (2) GND VS (2) 9 10 11 12 13 14 15 16 N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) N/C (1) SIMPLIFIED BLOCK DIAGRAM + + 8 + VS 8 4 SELF-TEST NOTES: 1. Internal connections. All N/C must remain floating, except DIP's pin 11 which must be tied to pin 8. 2. Bypass to ground with 0.1 F ceramic capacitor to improve noise performance. g G-CELL A 6 BYPASS LOW-PASS FILTER TEMPERATURE COMPENSATION 5 OUTPUT 7 GND This document contains information on a product under development. Motorola reserves the right to change or discontinue this product without notice. (c)Motorola Sensor Device Data Motorola, Inc. 1995 1 XMMAS500G10D XMMAS500G10S MAXIMUM RATINGS Rating Acceleration (biased each axis) Acceleration (unbiased each axis) Supply Voltage Storage Temperature Operating Temperature(6) Symbol G G VSmax Tstg TA Value 1000 2000 - 0.3 to +7.0 - 40 to +125 - 40 to +85 Unit g g Vdc C C OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted) Characteristic Acceleration Range Output Drive Capability Supply Voltage Supply Current Full Scale Output Range Sensitivity (over temperature range) (1) (2) (3) Zero Acceleration Output (TA = 25C) (4) Zero Acceleration Output (over temperature range) (3) (4) Linearity Transverse Sensitivity Frequency Bandwidth Noise Self-Test Output Equivalent (5) Self-Test Triggering Voltage Self-Test Input Current Symbol G -- VS IO VFSO V/G Voff Voff -- -- -- -- GS VTH -- Min 500 - 0.2 4.75 -- 0.3 2.9 2.3 2.1 -- -- -- -- 44 1.6 -- Typ -- -- 5.0 5.0 -- 3.2 2.5 2.5 0.5 1.0 700 20 50 -- 10 Max -- 0.2 5.25 -- 4.7 3.6 2.7 2.9 -- 3.0 -- 50 56 3.4 -- Unit g mA V mA V mV/g V V %FSO %FSO Hz mVpk g V A NOTES: 1. The output voltage increases from the Zero Acceleration Output for positive acceleration and decreases for negative acceleration. The typical sensitivity is 3.2 mV/g. For example, with VS = 5.0 V, a +250g input will result in a 3.3 V output. (Voutput = 2.5 + 0.0032 x 250) and a - 250g input will result in a 1.7 V output. 2. Sensitivity is a ratiometric parameter: V/G(Vs) = V/G(5 V) x (VS / 5 V). 3. The compensated temperature range is - 40 to +85C. 4. Zero Acceleration Output is a ratiometric parameter: Voff(Vs) = Voff(5 V) x (VS / 5 V). 5. Equivalent output in response to a Logic Level One on the self-test pin. 6. Additional temperature range available. Consult factory. ORDERING INFORMATION Device XMMAS500G10D XMMAS500G10S Temperature Range -40 to +85C -40 to +85C Case No. Case 648C-03 Case 447-01 Package Plastic DIP Plastic SIP 2 Motorola Sensor Device Data XMMAS500G10D XMMAS500G10S POSITIVE ACCELERATION SENSING DIRECTION 16 9 1 8 1 8 * DIP PACKAGE SIP PACKAGE * When positioned as shown, gravity will result in a positive 1g output SIP PACKAGE DRILLING PATTERN .499 .350 .250 .050 .000 .050 .150 .250 .350 .499 .240 7 x .040 + .004 - .000 .000 + .004 2 x .096 - .000 + .005 2 x .058 - .000 .240 Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters can and do vary in different applications. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Motorola Sensor Device Data 3 XMMAS500G10D XMMAS500G10S PACKAGE DIMENSIONS -A- 16 9 -B- 1 8 NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION L TO CENTER OF LEADS WHEN FORMED PARALLEL. 4. DIMENSION B DOES NOT INCLUDE MOLD FLASH. 5. INTERNAL LEAD CONNECTION BETWEEN 4 AND 5, 12 AND 13. L NOTE 5 C -T- SEATING PLANE N F E G D 16 PL 0.13 (0.005) M M K J 16 PL M DIM A B C D E F G J K L M N INCHES MIN MAX 0.740 0.840 0.240 0.260 0.145 0.185 0.015 0.021 0.050 BSC 0.040 0.70 0.100 BSC 0.008 0.015 0.115 0.135 0.300 BSC 0_ 10_ 0.015 0.040 MILLIMETERS MIN MAX 18.80 21.34 6.10 6.60 3.69 4.69 0.38 0.53 1.27 BSC 1.02 1.78 2.54 BSC 0.20 0.38 2.92 3.43 7.62 BSC 0_ 10_ 0.39 1.01 0.13 (0.005) TA S TB S CASE 648C-03 ISSUE C DIP PACKAGE E NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. NB V DIM A B C D E F G H J K L M N P Q R S U V A P C INCHES MIN MAX 1.095 1.110 0.600 0.640 0.428 0.434 0.016 0.020 0.125 0.135 0.063 0.068 0.095 0.105 0.236 0.244 0.009 0.011 0.114 0.124 0.045 0.055 0.058 0.065 0.295 0.305 0.875 0.885 0.051 0.055 0.000 0.007 0.480 0.490 0.040 0.050 0.075 0.085 MILLIMETERS MIN MAX 27.18 28.19 15.24 16.26 10.87 11.02 0.41 0.51 3.18 3.43 1.60 1.73 1.65 2.67 5.99 6.20 0.23 0.28 2.90 3.15 1.14 1.40 1.47 1.65 7.49 7.75 22.22 22.48 1.30 1.40 0.00 0.18 12.19 12.45 1.02 1.27 1.90 2.16 M R D L S G U F K J H Q CASE 447-01 ISSUE A Literature Distribution Centers: USA: Motorola Literature Distribution; P.O. Box 20912; Phoenix, Arizona 85036. EUROPE: Motorola Ltd.; European Literature Centre; 88 Tanners Drive, Blakelands, Milton Keynes, MK14 5BP, England. JAPAN: Nippon Motorola Ltd.; 4-32-1, Nishi-Gotanda, Shinagawa-ku, Tokyo 141, Japan. ASIA PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Center, No. 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 4 CODELINE TO BE PLACED HERE *XMMAS500G/D* Motorola Sensor Device Data XMMAS500G/D |
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