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 Amplified Low Pressure Sensors
1 mbar (0.4 In H2O) to 30 In H2O Pressure Sensors
Military Temperature Grade Features
* 0 to 1 mbar to 0 to 30 In H2O Pressure Ranges * Ratiometric 4V Output * Temperature Compensated (-40C to 125C) * Calibrated Zero and Span
3
Applications
* Medical Instrumentation * Environmental Controls * HVAC
General Description
The Amplified line of low pressure sensors is based upon a proprietary technology to reduce all output offset or common mode errors. This model provides a ratiometric 4-volt output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure.
These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like.
The output of the device is ratiometric to the supply voltage over a supply voltage range of 4.5 to 5.5 volts.
Physical Dimensions
0.25 (6.4)
Pin Size 0.010 x 0.020 (0.25 x 0.50) 0.174 to 0.190 (4.4 to 4.8) Pin 1 2 3 4 1
0.10 Typical (2.54)
pin 1: Vsupply
0.21 (5.3)
pin 2: Common pin 3: Voutput
A 1.08 (27.4) 0.66 (16.0) B
0.42 (10.5)
pin 4: do not connect
0.48 (12.2)
0.55 (14.0)
0.80 (20.3) 0.85 (21.6) 1.10 (27.9)
NOTES: 1) Dimensions in inches (millimeters)
3-3
Pressure Sensor Ratings
Supply Supply Voltage VS Common-mode pressure Lead Temperature, max (soldering 2-4 sec.) +4.5 to +5.5 Vdc -10 to +10 psig 250C
Environmental Specifications
Temperature Ranges Compensated Operating Storage Humidity Limits -40 to 125 C -40 to 125 C -40 to 125 C 0 to 95% RH (non condensing)
Standard Pressure Ranges
Part Number 1 MBAR-D-4V-MIL 1 INCH-D-4V-MIL 1 INCH-G-4V-MIL 5 INCH-D-4V-MIL 5 INCH-G-4V-MIL 10 INCH-D-4V-MIL 10 INCH-G-4V-MIL 20 INCH-D-4V-MIL 20 INCH-G-4V-MIL 30 INCH-D-4V-MIL 30 INCH-G-4V-MIL Operating Pressure 1 mbar 1 In H2O 0 - 1 In H2O 5 In H2O 0 - 5 In H2O 10 In H2O 0 - 10 In H2O 20 In H2O 0 - 20 In H2O 30 In H2O 0 - 30 In H2O Nominal Span 4V 4V 4V 4V 4V 4V 4V 4V 4V 4V 4V Proof Pressure 100 In H2O 100 In H2O 300 In H2O 200 In H2O 200 In H2O 200 In H2O 200 In H2O 300 In H2O 300 In H2O 500 In H2O 500 In H2O Burst Pressure 200 In H2O 200 In H2O 200 In H2O 300 In H2O 300 In H2O 300 In H2O 300 In H2O 500 In H2O 500 In H2O 800 In H2O 800 In H2O
Performance Characteristics for: 1 MBAR-D-4V-MIL
Parameter,
NOTE
1
Minimum
Nominal 1.0
Maximum
Units mbar
Operating Range, differential pressure Output Span,
NOTE
5
1.80 2.00 2
2.0 2.25
2.20 2.50 120
volt volt mvolt mvolt mvolt mvolt
Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE NOTE
3
20 40 20 0.05 0.25 4
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
%fs %span
3-4
Performance Characteristics for 1 INCH-D-4V-MIL
Parameter, note 1 Operating Range, differential pressure Output Span, note 5 Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE NOTE
Minimum
Nominal 1.0
Maximum
Units "H2O
1.90 2.15 2
2.0 2.25
2.10 2.35 60
volt volt mvolt mvolt mvolt mvolt
3
10 5 10 0.05 0.25 2
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
3
4 2
%fs %span
Performance Characteristics for 1 INCH-G-4V-MIL
Parameter, note 1 Operating Range, gage pressure Output Span, note 5 Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE NOTE
Minimum
Nominal 1.0
Maximum
Units "H2O
3.90 0.15 2
4.0 0.25
4.10 0.35 60
volt volt mvolt mvolt mvolt mvolt
3
10 15 10 0.05 0.25 2
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
%fs %span
Performance Characteristics for 5 INCH-D-4V-MIL
Parameter, note 1 Operating Range, differential pressure Output Span, note 5 Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE NOTE
Minimum
Nominal 5.0
Maximum
Units "H2O
1.90 2.15 2
2.0 2.25
2.10 2.35 40
volt volt mvolt mvolt mvolt mvolt
3
5 5 5 0.05 0.25 1
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
%fs %span
3-5
Performance Characteristics for: 5 INCH-G-4V-MIL
Parameter,
NOTE
1
Minimum
Nominal 5.0
Maximum
Units "H2O
Operating Range, gage pressure Output Span,
NOTE
5
3.90 0.15
NOTE
4.0 0.25
4.10 0.35 40
volt volt mvolt mvolt mvolt mvolt
Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE
2 5 5 5 0.05
3
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
0.25 1
%fs %span
Performance Characteristics for: 10 INCH-D-4V-MIL
Parameter,
NOTE
1
Minimum
Nominal 10.0
Maximum
Units "H2O
Operating Range, differential pressure Output Span,
NOTE
5
1.90 2.15 2
2.0 2.25
2.10 2.35 20
volt volt mvolt mvolt mvolt mvolt
Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE NOTE
3
5 5 5 0.05 0.25 1
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
%fs %span
Performance Characteristics for: 10 INCH-G-4V-MIL
Parameter,
NOTE
1
Minimum
Nominal 10.0
Maximum
Units "H2O
Operating Range, gage pressure Output Span,
NOTE
5
3.90 0.15
NOTE
4.0 0.25
4.10 0.35 20
volt volt mvolt mvolt mvolt mvolt
Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE
2 5 5 5 0.05
3
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
0.25 1
%fs %span
3-6
Performance Characteristics for 20 INCH-D-4V-MIL
Parameter, note 1 Operating Range, differential pressure Output Span, note 5 Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE NOTE
Minimum
Nominal 20.0
Maximum
Units "H2O
1.90 2.15 2
2.0 2.25
2.10 2.35 20
volt volt mvolt mvolt mvolt mvolt
3
5 5 5 0.05 0.25 1
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
3
4 2
%fs %span
Performance Characteristics for 20 INCH-G-4V-MIL
Parameter, note 1 Operating Range, gage pressure Output Span, note 5 Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE NOTE
Minimum
Nominal 20.0
Maximum
Units "H2O
3.90 0.15 2
4.0 0.25
4.1 0.35 20
volt volt mvolt mvolt mvolt mvolt
3
5 5 5 0.05 0.25 1
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
%fs %span
Performance Characteristics for 30 INCH-D-4V-MIL
Parameter, note 1 Operating Range, differential pressure Output Span, note 5 Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE NOTE
Minimum
Nominal 30.0
Maximum
Units "H2O
1.90 2.15 2
2.0 2.25
2.10 2.35 20
volt volt mvolt mvolt mvolt mvolt
3
5 5 5 0.05 0.25 1
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
%fs %span
3-7
Performance Characteristics for 30 INCH-G-4V-MIL
Parameter,
NOTE
1
Minimum
Nominal 30.0
Maximum
Units "H2O
Operating Range, gage pressure Output Span,
NOTE
5
3.9 0.15
NOTE
4.0 0.25
4.1 0.35 20
volt volt mvolt mvolt mvolt mvolt
Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift,
NOTE
2 5 5 5 0.05
3
Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, Span Shift (-40C-125C),
NOTE NOTE
4 2
0.25 1
%fs %span
Equivalent Circuit
Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 500 useconds.
Specification Notes
NOTE
1: ALL
PARAMETERS ARE MEASURED AT
5.0
VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE
UNLESS OTHERWISE SPECIFIED. NOTE
PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B.
NOTE
2: SHIFT IS RELATIVE TO 25C. 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. NOMINALLY THE OUTPUT VOLTAGE RANGE IS 0.25 TO 4.25 VOLTS FOR MINUS TO PLUS FULL SCALE PRESSURE.
All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
3-8


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