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| Silicon Piezoresistive Relative Pressure Sensor Features * * * * Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability * High long term stability * Built in silicon temperature sensor * Media compatible stainless housing KPY 51-R KPY 56-R Stainless Steel Package Type KPY 51-R KPY 52-R KPY 53-R KPY 54-R KPY 55-R KPY 56-R Pin Configuration 1 2 3 4 5 6 7 8 Symbol Pressure Range 0 ... 0.25 0 ... 0.6 0 ... 1.6 0...4 0 ... 10 0 ... 25 Unit bar Ordering Code Q62705-K174 Q62705-K171 Q62705-K176 Q62705-K178 Q62705-K180 Q62705-K182 P0 ... PN Capillary tube + VIN - VOUT Temperature sensor (typ. R25 = 2 k) Temperature sensor - VIN + VOUT Not connected 6 2 + R B(P) R B(P) R T(T) VIN R B(P) - R B(P) 3 VOUT + 7 4 5 EHS07025 Data Sheet 1 1999-04-01 KPY 51-R KPY 56-R Absolute Maximum Ratings Parameter Pressure overload KPY 51-R KPY 52-R KPY 53-R KPY 54-R KPY 55-R KPY 56-R Operating temperature range Storage temperature range Supply voltage Symbol Limit Values1) Frontside Rearside Unit bar 2 6 10 16 30 75 2 6 10 16 30 40 - 40 ... + 125 - 50 ... + 130 12 C C V PMAX TA Tstg VIN 1) Frontside coupling applies pressure onto chip face. Rearside coupling applies pressure through Kovar centre tube. Electrical Characteristics at TA = 25 C and VIN = 5 V, unless otherwise specified. Parameter Bridge resistance Sensitivity KPY 51-R KPY 52-R KPY 53-R KPY 54-R KPY 55-R KPY 56-R Output voltage KPY 51-R KPY 52-R KPY 53-R KPY 54-R KPY 55-R KPY 56-R Offset voltage Symbol min. Limit Values typ. - 24.0 15.0 8.8 6.0 2.6 1.2 30 45 70 120 130 150 - max. 8 32.0 24.0 12.5 9.0 4.0 2.0 40 72 100 180 200 250 mV - 25 + 25 k mV/ Vbar 4 16.8 11.0 5.6 4.0 1.8 0.88 Unit RB s Vfin 21 33 45 80 90 110 mV V0 P = P0 Data Sheet 2 1999-04-01 KPY 51-R KPY 56-R Electrical Characteristics (cont'd) at TA = 25 C and VIN = 5 V, unless otherwise specified. Parameter Linearity error (Best fit straight line) P0 = P0 ... PN KPY 51 ... 55-R KPY 56-R Pressure hysteresis P1 = P0, P2 = PN, P3 = P0 KPY 51 ... 56-R Symbol min. Limit Values typ. max. % Vfin - - 0.15 0.35 0.15 - 0.1 - % Vfin Unit FL PH - Electrical Characteristics at T1 = 25 C, T2 = 80 C, T3 = 25 C and VIN = 5 V, unless otherwise specified. Parameter Temperature coefficient of Vfin KPY 51-R KPY 52-R KPY 53-R KPY 54-R KPY 55-R KPY 56-R Temperature coefficient of V0 KPY 51-R KPY 52-R KPY 53-R KPY 54- R KPY 55-R KPY 56-R Temperature coefficient of RB KPY 51 ... 56-R Temperature hysteresis of V0; Vfin KPY 51 ... 56-R Symbol min. Limit Values typ. - - - - - - - - - - - - max. %/K - 0.20 - 0.20 - 0.20 - 0.20 - 0.20 - 0.20 - 0.09 - 0.12 - 0.13 - 0.14 - 0.15 - 0.15 %/K - 0.03 - 0.03 - 0.03 - 0.03 - 0.03 - 0.03 + 0.08 + 0.08 + 0.05 + 0.05 + 0.05 + 0.05 %/K - + 0.095 - % v. Vfin - 0.2 - Unit TCVfin TCV0 TCRB TH Data Sheet 3 1999-04-01 KPY 51-R KPY 56-R Package Outline Stainless Steel Package 20 0.6 0.7 8 0.6 8.9 -0.4 3.81 o19 -0.02 -0.05 3.15 +0.05 o1.05 -0.1 1 2 43 o17.6 0.05 o0.9 -0.2 7.62 o2.1-0.2 o0.65 -0.1 6 5 1.5 1.4 +0.2 Approx. 6 3.5 7.62 3.81 GMX06801 Weight 15.5 g Sorts of Packing Package outlines for tubes, trays etc. are contained in our Data Book "Package Information". Data Sheet 4 o1.5 78 Dimensions in mm 1999-04-01 o12.8 +0.1 |
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